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Future Rhenium Co., Ltd

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MOCVD

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MOCVD

  • Taxonomy:Re product

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  • Date of release:2018/11/29
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Detailed introduction

MOCVD

MOCVD is chemical vapor deposition of metal organic compounds.It is a novel vapor phase epitaxial growth technique developed on the basis of vapor phase epitaxy (VPE). Re is used as a key heating component for MOCVD due to its excellent high temperature performance. Compared with other materials, Re heating parts are favored by users because of their outstanding electrical properties, longer life and more resistant to harsh working atmosphere.

    Specification:Re≥99.99%

Impurities Content(%,max)

Element

Content

Element

Content

Element

Content

Element

Content

Na

0.0005

Ti

0.0001

Cu

0.0001

Sb

0.0001

Mg

0.0001

V

0.0001

Zn

0.0001

Ta

0.0001

Al

0.0005

Cr

0.0005

As

0.0001

W

0.0005

Si

0.0005

Mn

0.0001

Zr

0.0001

Pb

0.0001

P

0.0005

Fe

0.0008

Mo

0.0010

Bi

0.0001

K

0.0005

Co

0.0001

Cd

0.0001

Se

0.0001

Ca

0.0005

Ni

0.0001

Sn

0.0001

H

0.005

O

  0.01

C

0.002

N

0.001

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MOCVD.png

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